国家/地区 日本（2）
IPC部 B（2）
IPC大类 B82（2） C01（2） C23（2）
H01（2）
IPC小类 B82Y（2）
IPC C23C016/26（2）
发明人
公开年
申请年 2019（2）
专利权人

Detecting abnormal growth of graphene by preparing inspected object having graphene film formed by chemical vapor deposition on substrate, using dark-field optical system to receive light from film and detecting abnormal growth of graphene.

IFUKU R, MATSUMOTO T, FUJIO A, SAITO K, RYOTA I, TAKASHI M, AKIRA F, KOUSAKU S

Graphene nanoribbon precursor for use in graphene nanoribbon that is utilized in electronic device for channel of FET and resonant tunneling diode, comprises substituted terphenyl compound.

YAMAGUCHI J