国家/地区
IPC部 C（2）
IPC大类 C01（2）
IPC小类 C01B（2） C23C（2）
IPC C23C016/26（2）
发明人
公开年 2012（2）
申请年 2011（2）
专利权人

Synthesis of graphene involves preparing dielectric substrate, mounting electric furnace on substrate, increasing reaction temperature, and injecting carbon precursor on substrate.

SON M H, SONG H J, CHOI H C

Method of directly synthesizing uniform multilayer graphene of semiconductor device, involves passing reaction gas into reaction chamber, after temperature in reaction chamber reaches specific level.

ZHONG Z, LEE S, LEE K