国家/地区 德国（2）
IPC部 C（2）
IPC大类 C01（2） C23（2） H01（2）
IPC小类 C01B（2）
IPC C23C016/26（2）
发明人
公开年
申请年
专利权人

Forming layer, comprises e.g. exposing substrate to aromatic precursor in processing chamber, rinsing aromatic precursor from processing chamber, and heating substrate deposit graphene hard mask layer on substrate.

BHUYAN B J, LEONCINI A

Graphite nanofibers for electron emitting source and cathode of lithium ion secondary battery comprises graphene sheets having truncated conical shape, sequentially arranged through catalytic metal particles.

MURAKAMI H, HIRAKAWA M, TANAKA C