国家/地区 加拿大（2）
IPC部 B（2）
IPC大类 B01（2） C01（2）
IPC小类 B01D（2）
IPC C01B031/04（2）
发明人
公开年 2017（2）
申请年
专利权人

System for processing of carbonaceous compositions, has tank agitator configured to agitate graphene oxide in tank after graphene oxide is transferred to tank, where reaction system transfers graphene oxide from reaction vessel to tank.

LAINE S

Method for manufacturing pellicle for lithographic apparatus involves removing first substrate portion to form freestanding membrane from graphene layer, in which freestanding membrane is supported by second substrate portion.

PETER M, ABEGG E A, GIESBERS A J, KLOOTWIJK J H, NASALEVICH M A, VAN DEN EINDEN W T, VAN DER ZANDE W J, VAN ZWOL P, VERMEULEN J P M, VLES D F, VOORTHUIJZEN W, GIESBERS A J M, VAN ZWOL P J, VOORTHUIJZEN W P, VAN DEN EINDEN W T A J, VERMEULEN J P M B