国家/地区 美国（2）
IPC部 C（2）
IPC大类 C01（2）
IPC小类 C01B（2）
IPC
发明人 LIN C（2）
公开年
申请年 2016（2）
专利权人

Method of making a pellicle for use in extreme ultraviolet (EUV) lithography system, by depositing graphene layer over first material layer, and depositing amorphous silicon layer over graphene layer.

TU C, CHEN C, YOO C S, CHANG J, TSAI C, LIU P, LEE H, LIN C, LIN Y, TU Z, CHEN J, CAI J, YOU Q, ZHANG Z, LIN Z, LIU B, LI X, YOO C

Production of re-dispersible dry graphene powder for making composite involves producing solution of graphene sheets in solvent, adding surfactant to solution, and drying solution to produce dry graphene sheets coated with surfactant.

MING T, LIN C, KONG J