国家/地区 美国（2）
IPC部 C（2）
IPC大类 C01（2） C23（2） C30（2）
IPC小类 C01B（2）
IPC C30B025/02（2）
发明人
公开年 2021（2）
申请年 2020（2） 
专利权人

Coating metal workpiece e.g. electrical connector, involves exposing workpiece to carbon-containing precursor gas and hydrogen gas at preset flow rate and total gas pressure, and exposing to carbon-containing precursor gas and carrier gas.

ADAMS H J

System for growing crystalline material, has optical emission spectrometer (OES) that controls parameter in closed loop and maintains required proposition of plasma constituent for growth of crystalline materials in microwave plasma reactor.

SHARDA T, BHANDARI R, RAJNEESH B, TARUN S