国家/地区 日本（2） 美国（2） 世界知识产权组织（2）
IPC部 C（5）
IPC大类 C23（5）
IPC小类 C23C（5） C01B（3） H01J（2）
IPC C23C016/27（5）
发明人
公开年 2021（5）
申请年 2020（5）
专利权人

Continuous production apparatus of multiple types of carbon film, comprises reduction section for reducing substrate placed on belt conveyor, and raw material carbon source supply section that supplies raw material carbon source.

WATANABE J

METHOD OF OBTAINING POLYCRYSTALLINE DIAMOND FILMS.

POLUSHIN N I, MASLOV A L, LAPTEV A I

Marine detector electrode with multi-layer film structure has electrode substrate, first layer of boron-doped diamond film, graphene layer and second layer of boron-doped diamond film in turn from bottom to top.

ZHANG X, GAI Z, GUO F, WANG Y, CHAI X, CHEN Z, ZHANG L, WANG S, JIANG X

Processing device for forming film, consists of processing container having thermal sprayed ceramic coating on inner wall, mounting table for holding substrate and control unit for performing precoating and film forming.

WADA M, MATSUMOTO T, SUGIURA M, IFUKU R, UEDA H, KURYOTA L

System for growing crystalline material, has optical emission spectrometer (OES) that controls parameter in closed loop and maintains required proposition of plasma constituent for growth of crystalline materials in microwave plasma reactor.

SHARDA T, BHANDARI R, RAJNEESH B, TARUN S