国家/地区 加拿大（3）
IPC部 B（3）
IPC大类 B01（3）
IPC小类 B01D（3）
IPC C02F101/00（2） G21F009/02（2） G21F009/06（2）
发明人
公开年
申请年
专利权人

Method for manufacturing pellicle for lithographic apparatus involves removing first substrate portion to form freestanding membrane from graphene layer, in which freestanding membrane is supported by second substrate portion.

PETER M, ABEGG E A, GIESBERS A J, KLOOTWIJK J H, NASALEVICH M A, VAN DEN EINDEN W T, VAN DER ZANDE W J, VAN ZWOL P, VERMEULEN J P M, VLES D F, VOORTHUIJZEN W, GIESBERS A J M, VAN ZWOL P J, VOORTHUIJZEN W P, VAN DEN EINDEN W T A J, VERMEULEN J P M B

Filtering water from nuclear power plant according to isotopic forms, by obtaining waste stream of liquid, heating waste stream of liquid, passing gas into filtration module, and using graphene oxide membrane to separate gas.

WILSON J H

Sorption of materials from an environment e.g. aqueous solution involves associating graphene oxides with an environment comprising the materials containing radioactive elements, chlorates, perchlorates or organohalogens.

TOUR J M, SLESAREV A, KOSYNKIN D V, ROMANCHUK A Y, KALMYKOV S N, TOUR J, KOSYNKIN D, ROMANCHUK A, KALMYKOV S