国家/地区 中国（2）
IPC部 B（2）
IPC大类 B01（2） C01（2）
IPC小类 B01D（2）
IPC B01D067/00（2）
发明人
公开年
申请年 2016（2）
专利权人

Method for manufacturing pellicle for lithographic apparatus involves removing first substrate portion to form freestanding membrane from graphene layer, in which freestanding membrane is supported by second substrate portion.

PETER M, ABEGG E A, GIESBERS A J, KLOOTWIJK J H, NASALEVICH M A, VAN DEN EINDEN W T, VAN DER ZANDE W J, VAN ZWOL P, VERMEULEN J P M, VLES D F, VOORTHUIJZEN W, GIESBERS A J M, VAN ZWOL P J, VOORTHUIJZEN W P, VAN DEN EINDEN W T A J, VERMEULEN J P M B

Graphene oxide laminate membrane used in filtration device, comprises graphene oxide flakes and pristine graphene flakes which are from predetermined value of flakes of which graphene oxide laminate membrane is comprised.

KALANGI V S, NAIR R R