国家/地区 中国（5）
IPC部 B（5） F（3） C（2）
IPC大类 B08（5） F26（3）
IPC小类 B08B（5）
IPC B08B003/04（5）
发明人
公开年 2021（3）
申请年 2021（5）
专利权人

Apparatus for treating substrate, comprises substrate support assembly having spin head onto which substrate is seated, fluid supply unit for supplying fluid to substrate, bowl assembly having bowls overlaid to surround support assembly, and ascending and descending unit for moving bowl assembly.

LEE T Y, LI Z, LEE T

Graphene film preparation device, has cleaning and drying box whose side surface is provided with negative pressure device, and adjustable drying equipment installed on side surface of processing channel of cleaning and drying box away from edge chamfered boss.

DENG Z, LI P, XIAO G, XIONG S

Graphene radiating fin cleaning device for processing smart mobile phone, has drying box whose side wall is provided with winding device for making radiating fin main housing rewinding, cleaning tank is provided with cleaning liquid, radiating fin main housing is immersed in cleaning liquid.

CHEN X

Graphene-coated substrate dirt cleaning device, has water washing cleaning component for washing base material discharged in unreeling device, and drying component for drying discharged base material.

WANG Z, ZHOU R, ZHOU B, JIANG X

Nano lubricating method for improving corrugated roller hot rolled metal plate surface quality, involves carrying out heat treatment to single layer or composite metal plate obtained by rolling, straightening, trimming, and segmenting.

ZHAO J, MA L, MA X, WANG C, HUANG Q