国家/地区 韩国（2） 美国（2） 世界知识产权组织（2）
IPC部 B（2）
IPC大类 B01（2）
IPC小类 B01J（2）
IPC B01J035/02（2）
发明人
公开年
申请年
专利权人

Thermal treatment apparatus for high quality graphene synthesis, has catalyst metal film where outlet transferred from down direction diversion roller to winding roller are passed through feed roller in deposition chamber.

KIM Y K, YONG K K, KIM Y, KI K Y

Pre-processing method of catalyst metal layer during formation of graphene, involves activating catalyst metal layer by applying plasma of process gas containing reducible gas and nitrogen-containing gas to catalyst metal layer.

MATSUMOTO TAKASHI, MATSUMOTO T