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韩国(2)
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C01(2)
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C01B031/02(2)
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2013(2)
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Manufacture of graphene sheet involves growing thin film containing metal catalyst on substrate containing carbon source by providing reaction gas, reacting graphene sheet and heating supporter on graphene growth.
HUI H B, SU K G
Method for forming film of graphene involves placing substrate in processing chamber at reduced pressure, performing surface treatment process on portion of substrate, and providing carbon-containing material in processing chamber.
BOYD D A
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