国家/地区 中国（2）
IPC部 C（2）
IPC大类 C23（2） C25（2）
IPC小类 C23C（2）
IPC C23C014/24（2）
发明人
公开年 2023（2）
申请年
专利权人

Method for preparing composite mask plate in electronic device processing field, involves setting photo-etching pattern on mask plate, removing part of photoresist, removing remaining photoresist with cleaning solution, cleaning laser opening residue, and drying mask plate to finish preparation.

CAI J, JIANG C, ZHUANG M, WU J, ZHAO W, YAO Q

Lithium-carbon composite belt, comprises conductive substrate, metal lithium transition layer on at least one side of substrate, and lithium-carbon composite material layer positioned outside metal transition layer.

WANG W, SUN Z, HUAN Q, MU H, CHEN Q, KONG D