国家/地区 中国（2）
IPC部 C（2）
IPC大类 C30（2）
IPC小类 C30B（2）
IPC
发明人 YANG J（2）
公开年 2023（2）
申请年
专利权人

Reducing damage to substrate when using plasma-enhanced atomic layer deposition to grow thin film involves depositing oxide film on cleaned substrate using water/ozone source and metal source, and depositing nitride film using plasma source.

HU Y, ZHU X, TIAN F, YANG J, LIU H, QIU P, WEI H, ZHENG X, QIU H

Preparing enhanced reduction graphene oxide/carbon nanotube/pyrolytic carbon composite material involves subjecting graphene oxide/carbon nanotube foam to high-temperature thermal reduction to obtain reduced graphene oxide/carbon nanotube foam.

SHAO D, WANG S, LI Y, YANG J, JIA X, SONG H, WANG C, WEI P, ZHANG J, DING S, FENG L