国家/地区 Germany（4） Sweden（3）
关键词 GRAPHENE（4） MEMS（2） NEMS（2）
RF（2） STATISTIC（2） SUSPENDED GRAPHENE .（2）
WAFERSCALE FABRICAT.（2）
出版物 IEEE TRANSACTIONS O.（2）
出版时间 2017（2） 2019（2）
机构 KTH ROYAL INST TECHNOL（7）
作者 WAGNER S（7）

Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications

MICROSYSTEMS NANOENGINEERING

FAN XG, SMITH AD, FORSBERG F, WAGNER S, SCHRODER S, AKBARI SSA, FISCHER AC, VILLANUEVA LG, OSTLING M, LEMME MC, NIKLAUS F

Suspended Graphene Membranes with Attached Silicon Proof Masses as Piezoresistive Nanoelectromechanical Systems Accelerometers

NANO LETTERS

FAN XG, FORSBERG F, SMITH AD, SCHRODER S, WAGNER S, OSTLING M, LEMME MC, NIKLAUS F

Graphene ribbons with suspended masses as transducers in ultra-small nanoelectromechanical accelerometers

NATURE ELECTRONICS

FAN XG, FORSBERG F, SMITH AD, SCHRODER S, WAGNER S, RODJEGARD H, FISCHER AC, OSTLING M, LEMME MC, NIKLAUS F

Direct observation of grain boundaries in graphene through vapor hydrofluoric acid (VHF) exposure

SCIENCE ADVANCES

FAN XG, WAGNER S, SCHADLICH P, SPECK F, KATARIA S, HARALDSSON T, SEYLLER T, LEMME MC, NIKLAUS F

Wafer-Scale Statistical Analysis of Graphene FETs-Part I: Wafer-Scale Fabrication and Yield Analysis

IEEE TRANSACTIONS ON ELECTRON DEVICES

SMITH AD, WAGNER S, KATARIA S, MALM BG, LEMME MC, OSTLING M

Wafer-Scale Statistical Analysis of Graphene Field-Effect Transistors-Part II: Analysis of Device Properties

IEEE TRANSACTIONS ON ELECTRON DEVICES

SMITH AD, WAGNER S, KATARIA S, MALM BG, LEMME MC, OSTLING M

Piezoresistive Properties of Suspended Graphene Membranes under Uniaxial and Biaxial Strain in Nanoelectromechanical Pressure Sensors

ACS NANO

SMITH AD, NIKLAUS F, PAUSSA A, SCHRODER S, FISCHER AC, STERNER M, WAGNER S, VAZIRI S, FORSBERG F, ESSENI D, OSTLING M, LEMME MC