国家/地区 China（4）
关键词 GRAPHENE（2）
出版物
出版时间 2014（4）
机构 CHINESE ACAD.（4）
作者 XU DW（4）

Effects of rapid thermal annealing on properties of HfAlO films directly deposited by ALD on graphene

MATERIALS LETTERS

ZHENG L, CHENG XH, CAO D, WANG ZJ, XU DW, XIA C, SHEN LY, YU YH

Improvement of Al2O3 Films on Graphene Grown by Atomic Layer Deposition with Pre-H2O Treatment

ACS APPLIED MATERIALS INTERFACES

ZHENG L, CHENG XH, CAO D, WANG G, WANG ZJ, XU DW, XIA C, SHEN LY, YU YH, SHEN DS

Al2O3-Gd2O3 double-films grown on graphene directly by H2O-assisted atomic layer deposition

RSC ADVANCES

ZHENG L, CHENG XH, CAO D, ZHANG DL, WANG ZJ, XU DW, XIA C, SHEN LY, YU YH

HfO2 dielectric film growth directly on graphene by H2O-based atomic layer deposition

JOURNAL OF VACUUM SCIENCE TECHNOLOGY A

ZHENG L, CHENG XH, CAO D, WANG ZJ, XU DW, XIA C, SHEN LY, YU YH