| 国家/地区 | Japan(2) |
| 关键词 |
EDGE ORIENTATION(4)
|
| 出版物 | |
| 出版时间 | 2010(3) |
| 机构 | NATL INST MA.(2) |
| 作者 | ENOKI T(2) SASAKI K(2) WAKABAYASHI .(2) |
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
SALIMIAN F, DIDEBAN D
SCIENCE TECHNOLOGY OF ADVANCED MATERIALS
WAKABAYASHI K, SASAKI K, NAKANISHI T, ENOKI T
ACS NANO
CONG CX, YU T, WANG HM
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN
SASAKI K, SAITO R, WAKABAYASHI K, ENOKI T
