国家/地区 Japan(2)
关键词 EDGE ORIENTATION(4)
出版物
出版时间 2010(3)
机构 NATL INST MA.(2)
作者 ENOKI T(2) SASAKI K(2) WAKABAYASHI .(2)

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

SALIMIAN F, DIDEBAN D

SCIENCE TECHNOLOGY OF ADVANCED MATERIALS

WAKABAYASHI K, SASAKI K, NAKANISHI T, ENOKI T

JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN

SASAKI K, SAITO R, WAKABAYASHI K, ENOKI T