国家/地区
关键词 MEMS（3）
出版物
出版时间 2014（3）
机构
作者

Adhesion energy of few layer graphene characterized by atomic force microscope

SENSORS ACTUATORS APHYSICAL

LI P, YOU Z, CUIA TH

Graphitized silicon carbide microbeams: wafer-level, self-aligned graphene on silicon wafers

NANOTECHNOLOGY

CUNNING BV, AHMED M, MISHRA N, KERMANY AR, WOOD B, IACOPI F

Low frequency graphene resonators for acoustic sensing

MICROELECTRONIC ENGINEERING

GRADY E, MASTROPAOLO E, CHEN T, BUNTING A, CHEUNG R