国家/地区 Korea(6)
关键词 PHOTOLITHOGRAPHY(6)
出版物
出版时间 2016(2)
机构
作者

NANOSCIENCE NANOTECHNOLOGY LETTERS

PARK S, SHEHZAD MA, CHOI W, KWON YH, EOM J, SEO Y

SCIENCE OF ADVANCED MATERIALS

THIYAGARAJAN K, SARAVANAKUMAR B, MOHAN R, KIM SJ

JOURNAL OF VACUUM SCIENCE TECHNOLOGY B

CHEN X, ZHENG XH, KIM JK, LI XX, LEE DW

Micromachines

KIM SE, KIM MS, SHIN YC, EOM SU, LEE JH, SHIN DM, HONG SW, KIM B, PARK JC, SHIN BS, LIM D, HAN DW

CHEMICAL ENGINEERING JOURNAL

CHOI A, HOANG AT, VAN TTN, SHONG B, HU L, THAI KY, AHN JH