国家/地区 China（15）
关键词 FLEXIBLE（2） GRAPHENE（2） HUMIDITY SENSOR（2）
MEMS（2）
出版物 JOURNAL OF MICROMECHANICS MICROENGINEERING（15）
出版时间 2013（2） 2016（2） 2017（2） 2018（2） 2021（2）
机构 TSINGHUA UNI.（3） ZHEJIANG UNI.（2）
作者 XU Z（4） GAO C（3） LE XH（3） PANG JT（3）
XIE J（3） LI DS（2） WANG XH（2） ZHANG J（2）

Highly sensitive, reliable and flexible piezoresistive pressure sensors based on graphene-PDMS @ sponge

JOURNAL OF MICROMECHANICS MICROENGINEERING

JING Z, ZHANG Q, CHENG YQ, JI C, ZHAO D, LIU Y, JIA WD, PAN SR, SANG SB

A SAW hydrogen sensor based on decoration of graphene oxide by palladium nanoparticles on AIN/Si layered structure

JOURNAL OF MICROMECHANICS MICROENGINEERING

LI DS, LE XH, PANG JT, PENG L, XU Z, GAO C, XIE J

A humidity sensor based on AlN Lamb wave resonator coated with graphene oxide of different concentrations

JOURNAL OF MICROMECHANICS MICROENGINEERING

PANG JT, LE XH, XU Z, GAO C, XIE J

Double-sided masking and stress-release etching for the fabrication of high-aspect-ratio graphene micro-cantilever

JOURNAL OF MICROMECHANICS MICROENGINEERING

LI SS, ZENG MX, HUANG YF, ZHAN RZ, CHEN J, XU NS, SHE JC, DENG SZ

Performance and breakdown behavior of graphene field-effect transistors with thin gate oxides

JOURNAL OF MICROMECHANICS MICROENGINEERING

WANG Q, LIU S, ZHANG J, ZHU J, GE DH, REN NF

Micro supercapacitors based on a 3D structure with symmetric graphene or activated carbon electrodes

JOURNAL OF MICROMECHANICS MICROENGINEERING

LI SW, WANG XH, XING HX, SHEN CW

Fabrication of highly oriented reduced graphene oxide microbelts array for massive production of sensitive ammonia gas sensors

JOURNAL OF MICROMECHANICS MICROENGINEERING

ZHANG J, ZHANG RF, WANG XN, FENG W, HU PA, O NEILL W, WANG ZL

A microelectrode array electrodeposited with reduced graphene oxide and Pt nanoparticles for norepinephrine and electrophysiological recordings

JOURNAL OF MICROMECHANICS MICROENGINEERING

WANG L, SONG YL, ZHANG Y, XU SW, XU HR, WANG MX, WANG Y, CAI XX

Tunable liquid microlens arrays actuated by infrared light-responsive graphene microsheets

JOURNAL OF MICROMECHANICS MICROENGINEERING

JIANG W, LIU HZ, LI R, YE GY, WANG LL, CHEN BD, YIN L, SHI YS

High performance flexible ultraviolet photodetectors based on TiO2/graphene hybrid for irradiation monitoring applications

JOURNAL OF MICROMECHANICS MICROENGINEERING

ZHOU C, WANG XH, KUANG XL, XU SX