国家/地区 | Japan(4) |
关键词 | CHEMICAL VAPOR DEPO.(2) |
出版物 | |
出版时间 | |
机构 | CHUBU UNIV(2) |
作者 | NODA M(4) |
JOURNAL OF APPLIED PHYSICS
MATSUSHIMA M, NODA M, YOSHIDA T, KATO H, KALITA G, KIZUKI T, UCHIDA H, UMENO M, WAKITA K
JAPANESE JOURNAL OF APPLIED PHYSICS
MATSUSHIMA M, NODA M, KALITA G, UCHIDA H, WAKITA K, UMENO M
CHEMICAL PHYSICS LETTERS
YOSHIHARA N, NODA M
ASIAPACIFIC JOURNAL OF CHEMICAL ENGINEERING
YOSHIHARA N, TAHARA Y, NODA M