国家/地区 Usa(3) China(2) India(2)
关键词 PECVD(12)
出版物 ACS APPLIED MATERIA.(4)
出版时间 2021(12)
机构
作者 LU CH(2) YEH NC(2)

COATINGS

POLZER A, SEDLAK J, SEDLACEK J, BENES L, MOURALOVA K

CHINESE PHYSICS B

MIAO RX, ZHAO CH, WANG SQ, REN W, LI YF, SHU TK, YANG B

JAPANESE JOURNAL OF APPLIED PHYSICS

XU LY, XU Y, LUO AL, ZHOU H, CAO B, WANG CH, XU K

ACS APPLIED MATERIALS INTERFACES

ESQUEDABARRON Y, DEL PINO AP, LEBIERE PG, MUSHEGHYANAVETISYAN A, BERTRANSERRA E, GYORGY E, LOGOFATU C

ACS APPLIED MATERIALS INTERFACES

HAN JM, MA YF, WANG M, LI LH, TONG ZM, XIAO LT, JIA ST, CHEN XY