国家/地区 Japan（4）
关键词
出版物 JAPANESE JOURNAL OF APPLIED PHYSICS（4）
出版时间 2014（2）
机构 NATL INST ADV IND SCI TECHNOL（4）
作者 SATO M（4）

Integration of multilayer graphene wires onto tungsten plugs for carbon/metal hybrid interconnects

JAPANESE JOURNAL OF APPLIED PHYSICS

SATO M, TAKAHASHI M, NIHEI M, SATO S, YOKOYAMA N

Intercalated multilayer graphene wires and metal/multilayer graphene hybrid wires obtained by annealing sputtered amorphous carbon

JAPANESE JOURNAL OF APPLIED PHYSICS

SATO M, TAKAHASHI M, NAKANO H, TAKAKUWA Y, NIHEI M, SATO S, YOKOYAMA N

High-Current Reliability and Growth Conditions of Multilayer Graphene Wire Obtained by Annealing Sputtered Amorphous Carbon

JAPANESE JOURNAL OF APPLIED PHYSICS

SATO M, TAKAHASHI M, NAKANO H, MURO T, TAKAKUWA Y, SATO S, NIHEI M, YOKOYAMA N

Fabrication of Graphene Directly on SiO2 without Transfer Processes by Annealing Sputtered Amorphous Carbon

JAPANESE JOURNAL OF APPLIED PHYSICS

SATO M, INUKAI M, IKENAGA E, MURO T, OGAWA S, TAKAKUWA Y, NAKANO H, KAWABATA A, NIHEI M, YOKOYAMA N