国家/地区 China（15） India（4） England（2） Japan（2）
Korea（2） Singapore（2）
关键词 GRAPHENE（7） GRAPHENE OXIDE（3） HUMIDITY SENSOR（3）
MEMS（3） FLEXIBLE（2） MICROFLUIDIC（2）
出版物 JOURNAL OF MICROMECHANICS MICROENGINEERING（30）
出版时间 2021（5） 2022（5） 2018（4） 2017（3） 2019（3） 2013（2） 2015（2） 2016（2）
机构 TSINGHUA UNI.（3） NATL UNIV SI.（2） ZHEJIANG UNI.（2）
作者 XU Z（4） GAO C（3） LE XH（3） PANG JT（3）
XIE J（3） ANNAMALAI M（2） DONG SR（2） LI DS（2）
LUO JK（2） PALANIAPAN M（2） WANG XH（2） WANG ZQ（2）
ZHANG J（2） ZHAO J（2）

Highly sensitive, reliable and flexible piezoresistive pressure sensors based on graphene-PDMS @ sponge

JOURNAL OF MICROMECHANICS MICROENGINEERING

JING Z, ZHANG Q, CHENG YQ, JI C, ZHAO D, LIU Y, JIA WD, PAN SR, SANG SB

Metal-assisted-chemical-etching of silicon nanowires for templating 3D graphene growth towards energy storage in microsystems

JOURNAL OF MICROMECHANICS MICROENGINEERING

LI JH, TOAN NV, WANG ZQ, ONO T

A SAW hydrogen sensor based on decoration of graphene oxide by palladium nanoparticles on AIN/Si layered structure

JOURNAL OF MICROMECHANICS MICROENGINEERING

LI DS, LE XH, PANG JT, PENG L, XU Z, GAO C, XIE J

Surface acoustic wave devices with graphene interdigitated transducers

JOURNAL OF MICROMECHANICS MICROENGINEERING

ZHOU J, SHI XL, XIAO DB, WU XZ, ZHENG JP, LUO JK, ZHUO M, TAO X, JIN H, DONG SR, TAO R, DUAN HG, FU YQ

A humidity sensor based on AlN Lamb wave resonator coated with graphene oxide of different concentrations

JOURNAL OF MICROMECHANICS MICROENGINEERING

PANG JT, LE XH, XU Z, GAO C, XIE J

Double-sided masking and stress-release etching for the fabrication of high-aspect-ratio graphene micro-cantilever

JOURNAL OF MICROMECHANICS MICROENGINEERING

LI SS, ZENG MX, HUANG YF, ZHAN RZ, CHEN J, XU NS, SHE JC, DENG SZ

Microstructure-tunable highly conductive graphene-metal composites achieved by inkjet printing and low temperature annealing

JOURNAL OF MICROMECHANICS MICROENGINEERING

ZHAO J, SONG M, WEN CY, MAJEE S, YANG D, WU B, ZHANG SL, ZHANG ZB

Graphene-based inline pressure sensor integrated with microfluidic elastic tube

JOURNAL OF MICROMECHANICS MICROENGINEERING

INOUE N, ONOE H

Performance and breakdown behavior of graphene field-effect transistors with thin gate oxides

JOURNAL OF MICROMECHANICS MICROENGINEERING

WANG Q, LIU S, ZHANG J, ZHU J, GE DH, REN NF

Micro supercapacitors based on a 3D structure with symmetric graphene or activated carbon electrodes

JOURNAL OF MICROMECHANICS MICROENGINEERING

LI SW, WANG XH, XING HX, SHEN CW