国家/地区
IPC部 C（2）
IPC大类 C01（2） C23（2）
IPC小类 C01B（2） C23C（2）
IPC C01B032/186（2）
发明人 IFUKU R（2） MATSUMOTO T（2）
公开年 2018（2）
申请年 2017（2）
专利权人 TOKYO ELECTRON LTD（2）

Production of graphene used as wiring material, involves supplying carbon-containing gas and metal catalyst into chamber and reactivating catalyst by supplying process gas and carbon-containing gas to regrow graphene on catalyst surface.

IFUKU R, MATSUMOTO T

Formation of two-dimensional material e.g. graphene, involves forming amorphous film on substrate, modifying surface of amorphous film, and supplying raw material of two-dimensional material onto modified amorphous film.

IFUKU R, MATSUMOTO T