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韩国(2)
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B(2)
C(2)
IPC大类
B32(2)
C01(2)
IPC小类
B32B(2)
IPC
B32B037/00(2)
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YI S(2)
公开年
2022(2)
申请年
2021(2)
专利权人
ALPHA GRAPHE.(2)
Device e.g. in graphene transfer method comprises support part disposed under graphene transfer unit, moves graphene transfer unit in upper or lower direction, and substrate loading part transferred in chamber body, disposed on support part.
YI S
System e.g. in graphene transfer method comprises e.g. graphene conveying unit having carrier substrate adhered with graphene and heat treatment module disposed under jig with transfer substrate inserted into seating groove to be seated.
YI S, LEE S K
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