国家/地区 中国（2）
IPC部 C（2）
IPC大类 C23（2）
IPC小类 C23C（2）
IPC C23C014/04（2）
发明人
公开年
申请年 2022（2）
专利权人

Flexible pressure sensor based on two-dimensional quantum tunneling force-sensitive mechanism, has conformal carbon nano-film composed of graphene-structure of nano-wall and flexible substrate.

CHENG G, WEI D

Manufacturing graphene of pressure sensor, comprises e.g. manufacturing sensor structure, manufacturing mask plate of each layer of sensor structure and depositing insulating layer on silicon substrate surface.

WU X, RUI L, ZHANG Q, LU J, LI Y