国家/地区 韩国（3）
IPC部 C（3）
IPC大类 C01（2） C23（2） H01（2）
IPC小类 C01B（2） C23C（2） H01L（2）
IPC
发明人 KIM D W（3）
公开年 2023（3）
申请年 2022（3）
专利权人

Lithiation-induced porous palladium/nitrogen-doped graphene aerogel composite for highly reversible hydrogen storage, comprises nitrogen-doped porous carbonaceous structure and porous metal nanoparticle having pores.

KIM D W, CHOI J H, PARK M G, KANG J K, PARK M K

Chuck assembly used in semiconductor device fabrication system, comprises chuck base includes lower base and upper base that is on lower base, ceramic plate on upper base, and isolator ring enclosing outer sidewall of lower base.

JUNG U, SHIN M, SUNG D, NA D, KIM D, KIM K, JEONG S, JUNG S H, KIMKYUNGSUN, KIM D W, SUNG D Y, SU S M, JUNGUNGYO

Depositing graphene barrier film, involves placing substrate containing the titanium thin film layer into substrate processing system chamber forming processing space, supplying first reaction gas into chamber, supplying second reaction gas, and forming graphene layer on titanium thin film layer.

PARK J, LI J, JIN D, SUN W, KIM T, YIN Y, TIAN Z, BAK H, PARK J H, LEE K J, KIM D W, SUN W H, KIM T S, YOON W J, JEON J H, PARK H K, PARK H, JEONJINHO, YUN W J, WOO K D, LEE K