国家/地区 韩国（4）
IPC部 H（3） G（2）
IPC大类 H01（3） G03（2）
IPC小类 G03F（2） H01L（2）
IPC G03F001/22（2） G03F001/62（2） G03F001/64（2）
G03F007/20（2）
发明人 CHO J W（2） KIM H（2） KIM H K（2）
KIM H M（2） KIM H Y（2） KIM S G（2）
KIM S K（2） MI K H（2）
公开年 2022（3）
申请年 2022（4）
专利权人 KOREA ELECTRONICS TECHNOLOGY INST（4）

Anode used for lithium secondary battery, comprises anode active material comprising carbon-based material and metal-based compound, binder, and multi-composite conductive agent comprising carbon-based conductive agent and metal-based conductive agent having different physical properties and shapes.

LEE J, WOO S, SANGGIL W, JENAM L

Performing low-temperature direct growth method of multilayer graphene for manufacturing pellicle for extreme ultraviolet lithography, involves forming etch stopper on substrate, and forming seed layer on etch stopper, where seed layer is selected from boron nitride, or boron carbon nitride.

KIM H Y, CHO J W, KIM H M, KIM S G, KIM H K, KIM H, MI K H, KIM S K

Pellicle i.e. consumable component for protecting mask from contaminants in lithography process for semiconductor or display manufacturing, has substrate whose central portion is formed with opening, and pellicle layer containing amorphous carbon and core layer, formed on support layer.

KIM H Y, CHO J W, KIM H M, KIM S G, KIM H K, KIM H, MI K H, KIM S K, JEONJUNHYUCK, LEE S M

Method for manufacturing desorption layer of information display device, involves preparing support substrate and forming graphene oxide layer on support substrate, where support substrate is coated with graphene oxide dispersion.

CHOI Y, YOUNG P L, KIM S Y, YANG W S, YOON T Y