国家/地区 中国（3）
IPC部 G（3）
IPC大类 H01（3）
IPC小类 H01L（3）
IPC
发明人
公开年 2023（3）
申请年 2023（3）
专利权人

Method for preparing carbonaceous insulating layer of electron beam induced photoresist growth, involves utilizing organic solution to clean substrate by electron beam and wash photoresist solid film, and forming carbonaceous insulating layer after leaving electron beam irradiation under substrate.

HAO L, LI R, YU K, TIAN H, MA L

Ferroelectric field effect transistor gas sensor, comprises gate on substrate, and pulse gate voltage applied to gate to regulate polarization direction and strength of ferroelectric dielectric layer, thus realizing regulation of initial state of gas sensitive layer and gas desorption speed.

WANG Y, LIU Y, GUAN K, FENG S, WANG X, LIU L, ZHANG T

Manufacture of photoinduced excitation three-dimensional imaging device for projection screen, involves paving adhesive on single-layer graphene film, paving quantum dot particle array, solidifying particles, filling adhesive between particles, irradiating, and repeatedly paving film and array.

ZHOU L, YANG W, LIU K, LIU Q, YANG H, YUAN X, XIONG Y, YE Y, ZHANG W, ZHANG Y, WAN T, LI X