国家/地区 中国（2）
IPC部 H（2）
IPC大类
IPC小类
IPC
发明人 DEHE A（2） DEU A（2） RUHL G（2）
RUHR G（2）
公开年
申请年 2014（2） 
专利权人 DEHE A（2）

Hall sensor structure, has carrier layer provided with side part, and seed layer whose part is removed between carrier layer and graphene layer to form graphene structure of graphene layer, where seed layer is formed on side part.

DEHE A, ECKINGER M, KOLB S, RUHL G, DEU A, RUHR G, IKEGINGER M

MEMS acoustic transducer, has dielectric spacer arranged on back plate unit between adjacent conductive perforated back plate portions, and graphene membranes supported by dielectric spacer and extended over perforated back plate portions.

DEHE A, RUHL G, DEU A, RUHR G