国家/地区 韩国（2）
IPC部 G（2）
IPC大类 G01（2）
IPC小类
IPC
发明人
公开年 2017（2）
申请年
专利权人 KOREA RES INST STANDARDS SCI（2）

Method for manufacturing tactile sensor, involves preparing wafer, arranging graphene layer on passivation layer, forming graphene pattern on graphene layer, and performing wafer separating process to manufacture tactile sensor.

KIM M S, PARK Y, PARK M, AHN J H, PARK Y J, CHEN X, MIN S K, YON K P, MINHOON P, JONG H A, YONG J P, XIANG C

Producing biosensor, by forming patterned convex portion on substrate, obtaining graphene layer, separating substrate and graphene layer, processing surface of graphene layer and combining detection unit with resonant unit.

LEE C S, BAE M H, SEO J T, LEE S W, KIM H S, KIM Y S