国家/地区 世界知识产权组织（2）
IPC部 C（2） G（2）
IPC大类 C01（2） G01（2）
IPC小类 C01B（2） G01N（2）
IPC C01B032/186（2）
发明人 AKIRA F（2）
公开年 2020（2）
申请年
专利权人 TOKYO ELECTRON LTD（2）

Detecting abnormal growth of graphene by measuring reflection spectrum of measuring object having graphene film, creating film structure model to calculate polarization parameter, incorporating calculated value and detecting abnormal growth.

RYOTA I, TAKASHI M, AKIRA F, SHIN K

Detecting abnormal growth of graphene by preparing inspected object having graphene film formed by chemical vapor deposition on substrate, using dark-field optical system to receive light from film and detecting abnormal growth of graphene.

IFUKU R, MATSUMOTO T, FUJIO A, SAITO K, RYOTA I, TAKASHI M, AKIRA F, KOUSAKU S