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Graphene nanostructure solution manufacturing method for manufacturing graphene nano device utilized in semiconductor device, involves forming solution having graphene nanostructures by dispersing graphene nanostructure in solvent.
HONG S, KOH J
Graphene nanostructure fabricating method for semiconductor device, involves performing anisotropic etching by using aligned oxide nanostructure as mask, and removing remaining oxide nanostructure after anisotropic etching.
HONG S, KIM T H, LEE J, HONG S H, LEE C Y, KIM T
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