国家/地区 日本（2） 韩国（2） 美国（2） 世界知识产权组织（2）
IPC部 C（2）
IPC大类
IPC小类
IPC
发明人 KAGAYA M（2）
公开年 2014（2）
申请年
专利权人 TOKYO ELECTR.（2）

Organic-semiconductor film used for channel in transistor structure, has pseudo graphene structure including two-dimensional network structure which is formed continuously.

KAGAYA M, MATSUMOTO T, KATO D, KATO T

Production of graphene for wiring film of three-dimensional stacked memory, involves decomposing carbon-containing gas with low reactivity in space which opposes substrate, and decomposing carbon-containing gas with high reactivity.

KAGAYA M, MATSUMOTO T, NISHIDE D