国家/地区 韩国（2）
IPC部 C（2）
IPC大类 C23（2）
IPC小类 C23C（2）
IPC C23C016/26（2） C23C016/455（2）
发明人 KIM K S（2）
公开年 2020（2）
申请年 2018（2） 
专利权人 KOREA ELECTRONICS TECHNOLOGY INST（2）

Multilayer thin film having excellent barrier performance and mechanical flexibility useful in optical device, comprises graphene layer, first barrier layer which heals defect of graphene layer, conductive layer, and second barrier layer.

KIMHYUNGKEUN, CHO S M, KIM K S

Multilayer barrier thin film comprises graphene layer, first inorganic barrier layer position on graphene layer, organic barrier layer positioned on first inorganic barrier layer, and second inorganic barrier layer on organic barrier layer.

KIMHYUNGKEUN, CHO S M, KIM K S