国家/地区 韩国（3）
IPC部 C（2） G（2）
IPC大类 G03（2）
IPC小类 G03F（2）
IPC G03F001/22（2） G03F001/62（2）
发明人 KIM S K（3）
公开年 2023（3）
申请年 2021（3） 
专利权人 KOREA ELECTR.（2）

Cation exchange membrane useful in electrodeionization device for ultrapure water production system comprises cation exchange resin, binder resin, and reduced graphene oxide.

KIM S K, JEONG H Y, MOON Y G, SON E J

Pellicle used for exposure to extreme UV rays, comprises substrate having opening formed in central portion, etch stop layer formed on substrate to cover opening, and nanoporous graphene layer in which nanopores are formed on graphene layer, provided on etch stop layer.

KIMHYUNGKEUN, MI K H, KIM S K, JOJINWOO, KIM H Y

Method for manufacturing non-thick free-standing nanomembrane by using assist layer of carbon material, involves forming assist layer of carbon material on nano-thick membrane thin film, and selectively dry-etching assist layer.

KIMHYUNGKEUN, KIM S K, MI K H, KIM Y K, LIM H M