国家/地区 中国（4）
IPC部 B（2） H（2）
IPC大类 B05（2） H01（2）
IPC小类 B05C（2）
IPC B05C005/02（2） B05C009/12（2） B05C009/14（2）
发明人 WEI H（4）
公开年 2023（4）
申请年 2023（4）
专利权人 SHANDONG HUA.（2）

Reducing damage to substrate when using plasma-enhanced atomic layer deposition to grow thin film involves depositing oxide film on cleaned substrate using water/ozone source and metal source, and depositing nitride film using plasma source.

HU Y, ZHU X, TIAN F, YANG J, LIU H, QIU P, WEI H, ZHENG X, QIU H

Device for coating wire outer ring graphene, has shaping mechanism for shaping glue water, driving mechanism for driving shaping mechanism to rotate and cooling mechanism for condensing glue water.

HAN P, LI J, SUN S, WEI H, LENG J, LIU P, CHEN S, LIU Z

Cathode pole piece useful for battery comprises current collector whose surface is covered with cathode active material layer, where cathode active material layer is composed of cathode active material, tin and bismuth and sintered carbon.

LIU Z, WEI H, WANG K, YI J, ZHU W

Graphene coating processing device comprises wire material and coating module for sequentially glue, coating module, ring material block for guiding, brush and viscous material module for sticking graphite powder.

LIU H, ZHAO J, LIU Q, LIU J, MA Y, CHEN S, LENG J, LIU P, LIU Z, WEI H