国家/地区 中国（2）
IPC部 C（2）
IPC大类 C23（2）
IPC小类 C23C（2）
IPC C23C016/26（2）
发明人 ZHAO Y（2）
公开年
申请年 2019（2）
专利权人 HEFEI ORIGIN QUANTUM COMPUTATION TECHNOL（2）

Graphene heterojunction substrate transfer device, has transfer chamber provided with etching chamber and storage chamber, where etching chamber is formed with through hole that is connected with storage chamber.

KONG W, ZHAO Y

Device for producing graphene heterojunction by chemical vapor deposition, comprises vertically movable upper heater, lower heater, support frame arranged on lower heater, tray arranged on side of support frame and suspension catalyst unit.

KONG W, ZHAO Y