国家/地区 中国（2）
IPC部 C（3）
IPC大类 C04（3）
IPC小类 C04B（3）
IPC C04B035/58（3）
发明人
公开年
申请年
专利权人

Ceramic heater used in semiconductor manufacturing equipment, comprises ceramic substrate comprising aluminum nitride, magnesium oxide/alumina/spinel, calcium oxide and titanium dioxide, and resistance heating element.

KIM Y H, KIM J H, PARK H Y, KIM B S, HWAN K J, SUNG K

Preparing molybdenum disilicide-three-dimensional graphene complex material useful in wave absorbing material or stealth material comprises preparing graphene oxide aqueous solution, three-dimensional graphene hydrogel and drying.

LIU R, ZHAO Z, LI Y, PING Y, FU L, SHANG Y

Method for forming ceramic matrix composite structure, involves providing mixture of carbon nanotubes, graphene, and silicon carbon nitride, heating mixture to bond carbon nanotubes and graphene, and sintering carbon nitride in mixture.

BRALEY D J, BELK J H, BRELEY D J, BRALEY D Y, BELK Y H