国家/地区 美国（3）
IPC部 C（3）
IPC大类 C23（3） C01（2） H01（2）
IPC小类 C23C（3） C01B（2） H01L（2）
IPC C23C016/26（3）
发明人
公开年 2016（3）
申请年 2016（2） 
专利权人

Method for synthesizing multi-layer graphene e.g. trilayer graphene, involves heat-treating catalytic metal layer on substrate while supplying methane gas, and synthesizing multi-layer graphene on heat-treated catalytic metal layer.

HAM M, SON M, HAM M H, SON M W, XIAN W, SUN M

Chamber for synthesizing graphene at high-temperature/high-vacuum environment, has auxiliary heater placed between substrate and main heater and for heating auxiliary space between substrate and auxiliary heater for synthesizing graphene.

WON D, NAM W

Separating carbon structure including e.g. graphene and carbon nanotube deposited on seed structure, comprises e.g. providing carbon structure into processing chamber, heating carbon structure and seed structure, and supplying etching gas.

MATHARU J, THOMAS S, TEO K B K, JOUVRAY A, JOUBEUREI A, MATARU J, TOMASEU S