国家/地区 中国（4）
IPC部 C（4） G（2） H（2）
IPC大类 C23（4）
IPC小类 C23C（4） C01B（3） H01L（2）
IPC C23C028/00（4）
发明人
公开年
申请年 2016（2） 
专利权人

Optical element used in device such as adjustable optical mirror, comprises cover having first surface and second surface, support, and component set to move second surface from first cover contour profile to further cover contour profile.

CARTAMIL BUENO S J, CARTAMIL B S J

Method of making a pellicle for use in extreme ultraviolet (EUV) lithography system, by depositing graphene layer over first material layer, and depositing amorphous silicon layer over graphene layer.

TU C, CHEN C, YOO C S, CHANG J, TSAI C, LIU P, LEE H, LIN C, LIN Y, TU Z, CHEN J, CAI J, YOU Q, ZHANG Z, LIN Z, LIU B, LI X, YOO C

Method of manufacturing coating layer structure applied to machine element, involves locating continuous graphene structure layer between metal substrate and coating layer to act as buffer structure between substrate and coating layer.

HUANG Y, HU C, HU Q, HUANG Y C, HU C L

Method for isolating graphene thin film involves causing graphene thin film and polymer-based coating to be released from catalyst thin film, after curing polymer-based coating.

VEERASAMY V S, VEERASAMY V