国家/地区 |
日本(6)![]() |
IPC部 |
B(6)![]() |
IPC大类 |
B32(6)![]() |
IPC小类 |
B32B(6)![]() |
IPC |
B82Y030/00(5)
C23C016/26(5)
B82Y040/00(4)
C01B031/02(4) B32B015/04(3) C01B031/04(3) B05D005/12(2) B05D007/14(2) B32B009/00(2) C01B031/00(2) C23C016/02(2) C23C016/56(2) C30B029/02(2) H01L021/02(2) H01L021/20(2) |
发明人 | |
公开年 |
2011(6)![]() |
申请年 | 2010(4) |
专利权人 |
HASEGAWA MASATAKA, ISHIHARA MASATOU, KOGA YOSHINORI, KIM JAEHO, TSUGAWA KAZUO, IIJIMA SUMIO, HASEGAWA M, ISHIHARA M, KOGA Y, KIM J, TSUGAWA K, IIJIMA S, YOSHINORI K, HO K J, KAZUO T, SUMIO I, MASATAKA H, MASATOU I, JAEHO K
BAE S K, CHOI J, HONG B H, KANG J, KIM H K, KIM Y J, YAN J K
ADLER U, RODE D, BURESCH I, WANG J, FRECKMANN D, SCHMIDT H, ROHDE D, WANG Y
MCFEELY F R, YURKAS J J, OIDA S, HANNON J B
AGO HIROKI, ITO YOSHITO, TANAKA IZUMI, MIZUNO SEIGI, TSUJI MASAHARU, AGO H, ITO Y, TANAKA I, MIZUNO S, TSUJI M, MIZUNO K