国家/地区 中国（3）
IPC部 B（3）
IPC大类 B08（3）
IPC小类 B08B（3）
IPC B08B003/02（3）
发明人
公开年 2023（3）
申请年
专利权人

Surface stain fast detecting device for production of graphene, has cleaning portion that is composed of cleaning box portion, sliding seat, second sliding rod, elastic portion, placing plate, cleaning hole and bump.

WU S

Apparatus for treating substrate, comprises substrate support assembly having spin head onto which substrate is seated, fluid supply unit for supplying fluid to substrate, bowl assembly having bowls overlaid to surround support assembly, and ascending and descending unit for moving bowl assembly.

LEE T Y, LI Z, LEE T

Drying device for graphene, has electric valve that is fixedly connected with I-shaped cylinder, scraping component that is set in heating cylinder, and auxiliary component is set on one side of heating cylinder.

XU L, WEI J, LUO C, YE G, LI X, ZHOU M