国家/地区 韩国（2）
IPC部 C（2）
IPC大类 C01（2） C23（2）
IPC小类 C01B（2）
IPC C01B032/182（2）
发明人
公开年 2018（2）
申请年 2017（2）
专利权人

Producing graphene thin film involves coating multiple different metals having different carbon solubilities on upper surface of substrate to form multilayer metal film, and injecting multiple carbon atoms on upper surface of metal film.

KIM J H

Production of graphene used as wiring material, involves supplying carbon-containing gas and metal catalyst into chamber and reactivating catalyst by supplying process gas and carbon-containing gas to regrow graphene on catalyst surface.

IFUKU R, MATSUMOTO T