国家/地区 日本（3）
IPC部 C（3）
IPC大类 C01（3） C23（3）
IPC小类 C01B（3）
IPC C01B032/186（3）
发明人 UMENO M（2）
公开年 2020（2）
申请年 2018（3）
专利权人 SIZU TECHNO .（2）

Method for manufacturing graphene for coating cantilever used in scanning probe microscope, involves generating surface wave plasma of source gas by microwave excitation to directly form graphene film on substrate without using catalyst.

BSHWAKARMA L, ADHIKARI S, SBASHI S, UMENO M, MABUCHI Y

Chemical doping of graphene film involves irradiating laser to graphene film immersed in melt containing metallic compound dissolved in solvent.

AMUR A, UMENO M

Graphene-manufacturing apparatus includes reaction chamber defining reaction space, mold unit including mold body and outer surface, and driving unit connected to mold unit.

HUANG K, HUANG G