国家/地区 韩国（2）
IPC部 B（2）
IPC大类 C01（2）
IPC小类 C01B（2）
IPC C03C015/00（2）
发明人
公开年 2018（2）
申请年 2017（2） 
专利权人

Making porous graphene membrane comprises oxidizing surface of multilayer graphene, reducing oxidized surface to carry out reductive etching, and repeatedly performing series of the above steps twice until nanopores are formed in graphene.

JHON Y M, JHON Y I, LEE S, YOUNG I J, IN J Y

Manufacturing graphene film used for manufacturing pellicle involves coating graphene with protective film, removing base material by wet etching with etching liquid and dissolving protective film using solvent having lower surface tension.

YANASE Y, YANASE M, LIANG L