国家/地区 中国（2）
IPC部 B（2）
IPC大类 C01（2） C23（2）
IPC小类 C01B（2）
IPC C01B031/02（2）
发明人
公开年 2013（2）
申请年 2013（2）
专利权人

Film-forming apparatus for forming graphene film on film-forming target e.g. metallic foil, has roll-to-roll mechanism which provides tensile force relaxation unit that relaxes tensile force applied to transported film-forming target.

KOBAYASHI T, SHIMIZU K, KADONO K, MIZUGUCHI Y, MURAKAMI Y, MIZUKUCHI Y, SUMINO K

Method for forming film of graphene involves placing substrate in processing chamber at reduced pressure, performing surface treatment process on portion of substrate, and providing carbon-containing material in processing chamber.

BOYD D A