国家/地区 中国（3）
IPC部 C（3）
IPC大类 C01（3） C23（3）
IPC小类 C01B（3）
IPC C01B032/186（3）
发明人 LIU Z（3） PENG H（2）
公开年 2021（2）
申请年 2019（3）
专利权人 BEIJING GRAP.（3） UNIV PEKING（2）

Graphene composite metal foil double-side growth device has chemical vapor deposition furnace comprising plasma glow region and heating growth region, and connected with unwinding shaft and winding shaft on both sides.

PENG H, CAO F, YANG H, WANG K, WANG X, LIU Z

Method for preparing graphene wafer in batches using carrier, involves using chemical vapour deposition process to prepare graphene film on substrate, in which angle between gas flow direction and substrate is provided with specified value.

LIU Z, JIANG B, GAO X

Graphene film roll-to-roll production device comprises a vacuum cavity, a vacuum pump assembly and a filling assembly, where the process gas further comprises one monitoring component, and a parameter control assembly.

PENG H, YANG Q, DONG G, ZHA B, LIU Z