国家/地区 中国（2）
IPC部 C（2）
IPC大类 C04（2）
IPC小类 C04B（2）
IPC C23C016/02（2）
发明人
公开年 2022（2）
申请年
专利权人

Graphene sensor composite heat protection structure, comprises substrate layer, graphene sensitive layer, nitride isolation layer, alumina protective layer, and high temperature ceramic protective coating, where substrate layer is provided with a graphene sensitive layer.

LI M, ZHANG H, WANG J

Tantalum carbide-coated carbon material for e.g., LED manufacturing equipment, comprises a carbon substrate, and a tantalum carbide coating layer formed on the carbon substrate.

JO D W, CAO D, WAN J, CHO D W